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{| class="wikitable" style="float:right; margin: -10px 0px 10px 20px; text-align:left" |<center>''' 于晓梅 '''<br><img src=" https://www.ime.pku.edu.cn/images/content/2022-04/20220426113117735839.jpg " width="180"></center><small>[https://www.ime.pku.edu.cn/szll/rygc/y/1319581.htm 北京大学集成电路学院 ]</small> |} '''于晓梅''',女,北京大学集成电路学院教授。 ==人物履历== === 科研/教育经历 === 1978.7、1982.6: 吉林大学电子科学系,分别获得理学学士、理学硕士学位; 2001.6:北京航空航天大学材料科学系,获得工学博士学位; 1985.7-2001.9:北京航空航天大学应用物理系,助教、讲师、副教授; 1999.9-2000.10:丹麦技术大学微电子中心访问学者; 2001.10-现在:北京大学集成电路学院,博士后、副教授、教授。 ==研究领域== [[MEMS传感器]],集成制造工艺、[[超表面技术]]、[[太赫兹探测成像]] ==研究成果== 集成微悬臂梁传感器:开发出压阻式MEMS传感器与部分耗尽 SOI CMOS的单片集成制造工艺,研制出多通道集成微悬臂梁传感器,实现多种生化毒剂的高信噪比传感检测。 超表面技术:面向太赫兹和红外探测的应用需求,研制出多种类型超材料吸收体、超表面透镜、全息相位板、偏振片等超表面器件。 太赫兹焦平面阵列成像技术:通过将超材料吸收体与双材料微悬臂梁相集成,研制出热机械式太赫兹焦平面阵列,利用建立的高分辨率成像系统实现聚合物、金属、半导体等材料结构的二维和三维成像。 ==学术成果== === 论文 === * Xu J, Miao J, Liu Y, and Yu X. Performance enhanced terahertz imaging using a high-response thermomechanical microcantilever FPA. Infrared Physics & Technology, 2022, 123: 104161. * Yuan Tian, Yi Liu, Yang Wang, Jia Xu, and Xiaomei Yu*, “A flexible PI/Si/SiO2 piezoresistive microcantilever for trace-level detection of aflatoxin B1[J]. Sensors, 2021, 21(4): 1118. * Xu J, Jia D, Liu Y, Tian Y, and Yu X. Tunable terahertz metamaterial absorber actuated by thermomechanical bimaterial microcantilevers. Optics Express, 2020, 28(7): 10329-10336. * Jia D, Xu J, Xin T, Zhang C, and Yu X. Multifocal terahertz lenses realized by polarization-insensitive reflective metasurfaces. Applied Physics Letters, 2019, 108(10): 101105. * Jia D, Xu J, and Yu X. Ultra-broadband terahertz absorption using bi-metasurfaces based multiplexed resonances. Optics Express, 2018, 26(20): 26227-26234. * Yongzheng Wen, Delin Jia, Wei Ma, Yun Feng, Ming Liu, Liquan Dong, Yuejin Zhao2, * and Xiaomei Yu, Photomechanical meta-molecule array for real-time terahertz imaging, Microsystem and Nanoengineering, Volume 3, December 4 017 * Rui Zhao, Delin Jia, Yongzheng Wen, Xiaomei Yu*Cantilever-based aptasensor for trace level detection of nerve agent simulant in aqueous matrices,Sensors and Actuators B: Chemical, Vol.238, p.1231-1239,2016. * Reflective gradient metasurfaces for polarization-independent light focusing at normal or oblique incidence,Wei Ma, Delin Jia, Xiaomei Yu*, Applied Physics Letters, Vol.108(1) 2016. * Xu J, Miao J, Liu Y, and Yu X. A Dual-Band Terahertz Focal Plane Array For Material Composition Identification by Spectral Imaging. The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022), pp. 1054-1057. * Miao J, Xu J, Liu Y, Tian Y, and Yu X. Defect Detections of Polymers Materials Based on Bi-Material Microcantilever FPA at 3.1THz. The 21th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), IEEE 2021, pp. 1092-1095. * Delin Jia, Yuan Tian, Wei Ma, Xiaofeng Gong, Jiayi Yu, Guozhong Zhao, and Xiaomei Yu*, Dielectric gradient metasurface for efficient terahertz wave focusing, IEEE 31th International Conference (MEMS 2016), Belfast, United Kingdom. * Yuan Tian, Rui Zhao and Xiaomei Yu*, A flexible microcantilever aptasensor for trace level detection of ricin, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, June 18-22 2017, Kaohsiung, Taiwan. * Delin Jia, Wei Ma, Yongzheng Wen, and Xiaomei Yu*, A polarization and angle insensitive terahertz lens based on cascaded complementary metasurfaces, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, June 18-22 2017, Kaohsiung, Taiwan.<ref>[https://www.ime.pku.edu.cn/index.htm 北京大学集成电路学院]</ref> ==参考资料== {{reflist}} [[Category:教授]] *
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